The Japan Institute of Chemistry and Chemistry announced on February 17, 2016 that the effective use of coherent X-rays has been validated in X-ray Ptychography imaging using X-ray coherence. This confirmed that by using an algorithm that reconstructs the sample images with local coherence X-rays, the resolution can be increased compared to completely coherent X-rays.

X-ray Ptychography imaging technology through the X-ray diffraction intensity diagram for phase recovery calculation, the sample image reconstruction, the characteristics of the principle can achieve the degree of X-ray spatial resolution. However, the determination requires the use of high-intensity coherent X-rays. To reconstruct a sample image with high resolution using the large SPF-8 facility with the highest X-ray intensity in the world, to obtain an X-ray diffraction intensity map It also takes a long time.

This time using the "mixed state reconstruction algorithm", the algorithm sets the local coherence X-ray intensity distribution as the sum of the coherent X-rays of multiple modes that are not related to each other. However, as the coherence deteriorates and the number of modes increases, the number of diffraction intensity maps required also increases. Therefore, the number of modes is suppressed by concentrating the local coherence X-rays while the number of modes is determined by calculation simulation Efficient use of the coherent X-ray of the first mode is the best measurement condition.

This validation experiment uses a 12 nm thick tantalum test image as a sample and compares X-rays with almost complete coherence with locally coherent X-rays. The original method reconstructed the sample image only when it illuminated full coherence X-rays. However, when the mixed state reconstruction algorithm is used, both X-rays can reconstruct the sample images, but finally confirm that the X-ray with local coherence has a higher spatial resolution.

This shows that coherent X-ray of the first mode contained in the locally coherent X-ray has a higher intensity than the coherent X-ray. The comparison of the photon numbers of the first mode coherent X-ray irradiated by the reconstructed incident X-ray wavefield with the sample shows that the local coherent X-ray is about 6 times larger than the completely coherent X-ray. That is to say, this means that coherent X-rays can be used with a high efficiency of about 6 times.

By using this verification method, it is expected to improve the measurement efficiency of X-ray Ptychography. In particular, in the three-dimensional imaging necessary for the measurement of a biological sample composed of a light element and for the measurement of a plurality of incident X-ray angles, excellent effect. In addition, by standardizing this approach and promoting access, more results are expected to be created. The result has been published in the February 15 issue of Applied Physics Letters and online edition (February 16 issue).

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